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Device for holding disc-shaped objects
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Holding device for use in coordinates-measuring device, has supporting points for two-dimensional substrate such that supporting points carry two-dimensional substrate, where substrate is force-freely held with objects
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Device for holding disk-shaped objects
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Device for scanning surface of semiconductor, comprises scanning device for scanning surface, which has lighting device that withdraws light rays and glass fiber element
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Method for adapting a model spectrum to a measurement spectrum
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Method of calculating a model spectrum
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Method for inspecting a wafer
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System for inspection of a disc-shaped object
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Optical measuring arrangement, in particular for measuring layer thicknesses
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Arrangement for the visual inspection of substrates
