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NANOPHOTONICS AG

Overview
  • Total Patents
    38
About

NANOPHOTONICS AG has a total of 38 patent applications. Its first patent ever was published in 1998. It filed its patents most often in Germany, United States and WIPO (World Intellectual Property Organization). Its main competitors in its focus markets measurement, semiconductors and optics are SUPRASENSOR TECH LLC, DIMMLER KLAUS and RISOTETSUKU JAPAN KK.

Patent filings per year

Chart showing NANOPHOTONICS AGs patent filings per year from 1900 to 2020

Top inventors

# Name Total Patents
#1 Abraham Michael 22
#2 Drews Dietrich 9
#3 Lang Andreas 7
#4 Siebert Soenke 6
#5 Schweiger Michael 6
#6 Nikolov Mladen 6
#7 Eberhardt Matthias Dr 4
#8 Raaijmakers Ivo J M M 4
#9 Depner Oliver 4
#10 Gaudon Alain 4

Latest patents

Publication Filing date Title
WO2010015695A1 Inspection device and method for optical investigation of object surfaces, in particular wafer edges
WO2009127572A1 Inspection system and method for the optical analysis of the surfaces of objects, especially wafer surfaces
DE102009000528A1 Inspection device and method for the optical examination of object surfaces, in particular of wafer surfaces
DE102008041135A1 Inspection device and method for the optical examination of object surfaces, in particular a wafer shot
DE102008001171A1 Inspection system and method for the optical examination of object edges, in particular wafer edges
DE102008001173B3 Classification device and method for the classification of surface defects, especially from wafer surfaces
DE102006045866A1 Holding and rotating device for touch-sensitive flat objects
DE102005000665A1 Gripper for holding and positioning a disc-shaped or plate-shaped object and method for holding and positioning a disc-shaped or plate-shaped object
DE102004036435A1 Holding device for disc-shaped objects
DE102004021790B3 Chemical analysis system for surface of ultra-thin layer of semiconductor wafer uses Photo Emission Electron Microscopy sensor in chamber with vacuum-tight window in front of photodetector
DE10332572A1 Fabrication installation for semiconductor wafers and components, includes measurement module for registering wafer surfaces
DE10217028C1 Measuring module for wafer production plants
US2003193671A1 Measurement box with module for measuring wafer characteristics
US2003193660A1 Measuring module
EP1273031A1 Modular substrate measurement system
DE10042123A1 Apparatus for performing optical measurements on a sample in a vacuum chamber
US6420864B1 Modular substrate measurement system
EP0950881A2 Method and device for automatically positioning samples relative to an ellipsometer
DE19842364C1 Micropolarimeter and ellipsometer
DE19816974C1 Device to identify relative position of sample to be tested