Separating wall having a gap for dividing process chambers of a vacuum deposition installation comprises measuring devices, evaluating devices, and adjusting devices
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Method for operating a high-power electron beam
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Device for covering a substrate with thin layers
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Device for plasma-chemical deposition of polycrystalline diamond
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A method for stabilizing a working point in reactive sputtering in an oxygen-containing atmosphere
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Device for feeding in and out of workpieces in a coating chamber
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Process for coating a substrate and coating system for carrying it out
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Method and device for the continuous or quasi-continuous coating of spectacle lenses
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Vacuum coating system
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Extractor ion gauge
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Device for locking a flat, preferably circular disk-shaped substrate on the substrate plate of a vacuum coating system
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Method and apparatus for coating substrates in a vacuum chamber, with means for detecting and suppressing unwanted arcing
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Plasma-assisted, chemical vacuum coating system
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Method and device for evaporating absorbent thin layers on a substrate
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Process for evaporating a layer
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Device for the surface treatment of substrates by the action of plasma
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Device for holding flat, circular disk-shaped substrates in the vacuum chamber of a coating or etching system
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Vacuum pump with converter
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Process for evacuating a vacuum chamber and a high vacuum chamber, and high vacuum system for carrying it out
