|
US2009277778A1
|
|
Microwave rotatable sputtering deposition
|
|
US2008110752A1
|
|
System and method for high-energy sputtering using return conductors
|
|
US2008113107A1
|
|
System and method for containment shielding during pecvd deposition processes
|
|
US2007190808A1
|
|
Low-k dielectric layers for large substrates
|
|
US2008113108A1
|
|
System and method for control of electromagnetic radiation in pecvd discharge processes
|
|
US2007095281A1
|
|
System and method for power function ramping of microwave liner discharge sources
|
|
US2006278521A1
|
|
System and method for controlling ion density and energy using modulated power signals
|
|
US2006278524A1
|
|
System and method for modulating power signals to control sputtering
|
