| # | Country | Total Patents | |
|---|---|---|---|
| #1 | United States | 4 | |
| #2 | EPO (European Patent Office) | 3 | |
| #3 | WIPO (World Intellectual Property Organization) | 3 | |
| #4 | Australia | 2 | |
| #5 | Japan | 2 | |
| #6 | Canada | 1 |
| # | Industry | |
|---|---|---|
| #1 | Machine tools | |
| #2 | Machines | |
| #3 | Semiconductors | |
| #4 | Measurement |
| # | Name | Total Patents |
|---|---|---|
| #1 | Montoya Thomas T | 7 |
| #2 | Farzan Farshad | 2 |
| #3 | Epstein Jack | 2 |
| #4 | Steere Jr Robert E | 2 |
| #5 | Steere Robert E | 2 |
| #6 | Steere Iii Robert E | 2 |
| #7 | Paulison Lee | 2 |
| #8 | Steere Robert E Iii | 1 |
| #9 | Steere Colby R | 1 |
| Publication | Filing date | Title |
|---|---|---|
| US6306016B1 | Wafer notch polishing machine and method of polishing an orientation notch in a wafer | |
| EP1050898A2 | An apparatus and method for aligning a processed wafer for regrinding and/or polishing | |
| WO2004011953A1 | Spiral chuck | |
| AU3749800A | Prober interface plate | |
| US6290274B1 | Vacuum system and method for securing a semiconductor wafer in a planar position | |
| US6271676B1 | Spiral chuck | |
| US6055694A | Wafer scrubbing machine | |
| EP0898694A1 | Translation and rotation coupled positioning method and apparatus |