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SPEEDFAM IPEC CORP

Overview
  • Total Patents
    332
About

SPEEDFAM IPEC CORP has a total of 332 patent applications. Its first patent ever was published in 1996. It filed its patents most often in United States, WIPO (World Intellectual Property Organization) and Taiwan. Its main competitors in its focus markets machine tools, semiconductors and machines are DAITO ELECTRON CO LTD, HANGZHOU ZHONGGUI ELECTRONIC TECH CO LTD and SPEED FAM IPEC CORP.

Patent filings per year

Chart showing SPEEDFAM IPEC CORPs patent filings per year from 1900 to 2020

Top inventors

# Name Total Patents
#1 Schultz Stephen C 34
#2 Adams John A 32
#3 Herb John D 25
#4 Karlsrud Chris 23
#5 Laursen Thomas 22
#6 Dyer Timothy S 20
#7 Korovin Nikolay N 20
#8 Gopalan Periya 19
#9 Allen Robert F 19
#10 Chadda Saket 18

Latest patents

Publication Filing date Title
US7140956B1 Work piece carrier with adjustable pressure zones and barriers and a method of planarizing a work piece
US2005070205A1 Integrated pressure control system for workpiece carrier
US6796887B2 Wear ring assembly
GB0220881D0 Carrier including a multi-volume diaphragm for polishing a semiconductor wafer and a method therefor
KR20040022691A Carrier including a multi-volume diaphragm for polishing a semiconductor wafer and a method therefor
JP2004165175A Carrier with multi-volume diaphragm for polishing semiconductor wafer and polishing method
US6567725B1 Method and apparatus for teaching robot station location
US6702866B2 Homogeneous fixed abrasive polishing pad
US6790123B2 Method for processing a work piece in a multi-zonal processing apparatus
US6878039B2 Polishing pad window for a chemical-mechanical polishing tool
US6802955B2 Method and apparatus for the electrochemical deposition and planarization of a material on a workpiece surface
WO02057052A1 Abrasive free polishing in copper damascene applications
US7314402B2 Method and apparatus for controlling slurry distribution
US6752442B2 Workpiece handling end-effector and a method for processing workpieces using a workpiece handling end-effector
US6586337B2 Method and apparatus for endpoint detection during chemical mechanical polishing
US2003073381A1 Workpiece carrier with adjustable pressure zones and barriers
US7083515B2 Clean room facility and construction method
US6818604B2 System and method for cleaning workpieces
US6923711B2 Multizone carrier with process monitoring system for chemical-mechanical planarization tool
US2002067985A1 Work piece wand and method for processing work pieces using a work piece handling wand