| # | Country | Total Patents | |
|---|---|---|---|
| #1 | United States | 16 |
| # | Industry | |
|---|---|---|
| #1 | Semiconductors | |
| #2 | Machine tools | |
| #3 | Basic materials chemistry | |
| #4 | Machines |
| # | Technology | |
|---|---|---|
| #1 | Semiconductor devices | |
| #2 | Grinding or polishing devices | |
| #3 | Polishing compositions | |
| #4 | Grinding tools | |
| #5 | Unspecified technologies |
| # | Name | Total Patents |
|---|---|---|
| #1 | Schwandner Juergen | 16 |
| #2 | Koppert Roland | 6 |
| #3 | Buschhardt Thomas | 3 |
| #4 | Kerstan Michael | 3 |
| #5 | Pietsch Georg | 2 |
| #6 | Schwab Guenter | 1 |
| #7 | Feijoo Diego | 1 |