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Improved High Density Tec-Cell Carrier
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Improved substrate compartment cleaning
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Improved high-density stocker
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Overhead manufacturing, processing and storage system
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Improved substrate storage and processing
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Storage device for storing and/or for transporting objects from the site of production of electronic components
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Detection device for determining position information.
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Feeder for wafer processing.
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Storage device, especially for the intermediate storage of test wafers
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Device and method for cleaning articles used in the production of semiconductor components
