US2010270628A1
|
|
Multifunction MEMS element and integrated method for making MOS and multifunction MEMS
|
US2010144156A1
|
|
Method to integrate micro electro mechanical system and cmos image sensor
|
US2010090298A1
|
|
MEMS diaphragm
|
US2010068832A1
|
|
Method for the protection of information in multi-project wafers
|
US2009123877A1
|
|
Method for forming an opening of nano-meter scale
|
US2009117835A1
|
|
Expandable polishing platen device
|
US2008305609A1
|
|
Method for forming a seamless shallow trench isolation
|
US2007144892A1
|
|
Method for forming metal film or stacked layer including metal film with reduced surface roughness
|
US2007072356A1
|
|
Method for reducing positive charges accumulated on chips during ion implantation
|