| # | Country | Total Patents | |
|---|---|---|---|
| #1 | WIPO (World Intellectual Property Organization) | 21 | |
| #2 | China | 3 |
| # | Industry | |
|---|---|---|
| #1 | Semiconductors | |
| #2 | Surface technology and coating | |
| #3 | Measurement | |
| #4 | Electrical machinery and energy | |
| #5 | Chemical engineering |
| # | Name | Total Patents |
|---|---|---|
| #1 | Wu Fengli | 10 |
| #2 | Jiang Wei | 6 |
| #3 | Liu Yijun | 5 |
| #4 | Yu Peng | 4 |
| #5 | Fang Shicai | 4 |
| #6 | Zheng Yingjie | 4 |
| #7 | Lv Guangquan | 3 |
| #8 | Lian Jie | 3 |
| #9 | Su Xin | 3 |
| #10 | Zhou Ren | 3 |
| Publication | Filing date | Title |
|---|---|---|
| CN102877027A | Double vacuum loading cavity of common vacuum system | |
| CN102747341A | Special tool for installing wafer bracket and method for installing special tool | |
| CN103122456A | Gas mixing and distributing structure of double-chamber or multi-chamber thin film deposition equipment |