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KR20210033564A
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Substrate supporting structure
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Substrate inducing holder
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Substrate alignment apparatus and thin film deposition system including the same
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Cluster type deposition equipment
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Evaporation source
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Apparatus for separating crucible nozzle cap
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Crucible for point evaporation source and point evaporation source having the same
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Reflector for deposition source and deposition source having the same
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Evaporation source
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Baking device of heater for evaporation source
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Apparatus for Preventing Deflection of Shutter in Feeder
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Crucible Member Having Heat Shield
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Sensor pollution prevention shield and apparatus for measuring thickness of deposited film having shield
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Signal Spring Connector for Connecting Carousel
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KR20200132206A
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Planarizer for crucible for evaporation source
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wafer size expanding unit and wafer alignment apparatus including the same
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KR20200129285A
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Sensor alignment apparatus and deposition apparatus including the same
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KR20200125289A
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Evaporation source
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Deposition material monitoring apparatus
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Tamping Jig for Measuring Deposition Material and Apparatus for Measuring Deposition Material Having the Same
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