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SENSARRAY CORP

Overview
  • Total Patents
    43
About

SENSARRAY CORP has a total of 43 patent applications. Its first patent ever was published in 1995. It filed its patents most often in United States, WIPO (World Intellectual Property Organization) and Taiwan. Its main competitors in its focus markets semiconductors, measurement and control are CHEN CHUNG-HUI, DRESDEN ING HOCHSCHULE and CHANGZHOU RUIHUA POWER ELECTRONIC DEVICES CO LTD.

Patent filings per year

Chart showing SENSARRAY CORPs patent filings per year from 1900 to 2020

Top inventors

# Name Total Patents
#1 Renken Wayne G 19
#2 Sun Mei H 17
#3 Renken Wayne Glenn 13
#4 Gordon Roy 11
#5 Renken Wayne 7
#6 Jensen Earl 6
#7 Jensen Earl M 4
#8 Parker Jeffrey M 4
#9 Schwaninger Richard 3
#10 Vandenabeele Peter Michael Noe 3

Latest patents

Publication Filing date Title
WO2007130790A2 Process condition measuring device with shielding
TW200739780A Process condition sensing wafer and data analysis system
US2006015294A1 Methods of configuring a sensor network
WO2005116782A1 Process module tuning
US7135852B2 Integrated process condition sensing wafer and data analysis system
US7151366B2 Integrated process condition sensing wafer and data analysis system
US2005081398A1 Sensor positioning systems and methods
TW200305916A System and method for heating and cooling wafer at accelerated rates
US6889568B2 Process condition sensing wafer and data analysis system
US6616332B1 Optical techniques for measuring parameters such as temperature across a surface
US6190040B1 Apparatus for sensing temperature on a substrate in an integrated circuit fabrication tool
US6325536B1 Integrated wafer temperature sensors
US5929689A Photodetector quiescent current compensation method and apparatus
US5967661A Temperature calibration substrate
WO9607086A1 A temperature calibration substrate