KR20080098825A
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Hollow cathode discharge sputtering system
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KR20080098826A
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Method for forming coating layer on inner wall of pipe through hollow cathode discharge deposition
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KR20080090166A
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Anti-corrosional, no harmful transporting structure of water pipes
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KR100662210B1
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Apparatus of nozzle type for treating the surface of a substrate with plasma in atmospheric pressure
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KR20070077545A
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Apparatus for treating the surface of a substrate having supply pipe for treatment gas
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KR100725188B1
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Inner wall-protected metallic pipe by plastic thin film having at least one metallic coating layer
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KR20070042381A
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Apparatus for treating the surface of a substrate with plasma in atmospheric pressure
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KR20070012894A
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Semiconductor doping method using pulsed inductively coupled plasma and systemt therefor
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KR20060100543A
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Inner wall-protected pipe and liquid reservoir by thin film having metallic coating layer formed through plasma discharge deposition
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KR100592982B1
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Method for trasforting a fluid containing unstable gas through bundles of tubes
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KR20040079029A
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Improved method and apparatus for removing contaminants from the surface of a substrate
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KR20040075409A
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Neutral particle beam lithography
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KR20040048272A
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Apparatus for treating the surface of a substrate with atmospheric pressure plasma
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KR20020048332A
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Apparatus and method for removing contaminants from the surface of a substrate
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KR20030014481A
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Plasma processing apparatus to treat both surfaces of a target
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KR20030008856A
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The Large-Area Plasma Antenna(LAPA) and The Plasma Source For Making Uniform Plasma
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