| # | Country | Total Patents | |
|---|---|---|---|
| #1 | Republic of Korea | 5 | |
| #2 | Taiwan | 4 | |
| #3 | United States | 4 | |
| #4 | WIPO (World Intellectual Property Organization) | 4 | |
| #5 | EPO (European Patent Office) | 1 |
| # | Industry | |
|---|---|---|
| #1 | Semiconductors | |
| #2 | Chemical engineering | |
| #3 | Machine tools | |
| #4 | Machines | |
| #5 | Electrical machinery and energy | |
| #6 | Measurement | |
| #7 | Mechanical elements |
| # | Technology | |
|---|---|---|
| #1 | Semiconductor devices | |
| #2 | Cleaning | |
| #3 | Blasting | |
| #4 | Electric discharge tubes | |
| #5 | Unspecified technologies | |
| #6 | Measuring electric variables | |
| #7 | Venting or aerating devices | |
| #8 | Spraying devices |
| # | Name | Total Patents |
|---|---|---|
| #1 | Balooch Mehdi | 12 |
| #2 | Varghese Ivin | 11 |
| #3 | Bowers Charles W | 10 |
| #4 | Swanson Gordon Scott | 7 |
| #5 | Askin Steven R | 2 |
| #6 | Swanson Gordon | 1 |
| #7 | Varghese Lvin | 1 |
| Publication | Filing date | Title |
|---|---|---|
| KR20150120522A | Smart valve | |
| WO2013173578A2 | Contamination removal apparatus and method | |
| WO2012058548A1 | Integrated substrate cleaning system and method | |
| TW201131613A | Co2 nozzles | |
| KR20100130588A | Fluid injection assembly for nozzles |