| # | Country | Total Patents | |
|---|---|---|---|
| #1 | United States | 9 | |
| #2 | WIPO (World Intellectual Property Organization) | 5 |
| # | Industry | |
|---|---|---|
| #1 | Electrical machinery and energy | |
| #2 | Chemical engineering | |
| #3 | Semiconductors | |
| #4 | Basic materials chemistry | |
| #5 | Surface technology and coating | |
| #6 | Machine tools | |
| #7 | Machines |
| # | Technology | |
|---|---|---|
| #1 | Electric discharge tubes | |
| #2 | Cleaning | |
| #3 | Semiconductor devices | |
| #4 | Soaps | |
| #5 | Grinding or polishing devices | |
| #6 | Coating metallic material | |
| #7 | Unspecified technologies | |
| #8 | Electrolytic coating production |
| # | Name | Total Patents |
|---|---|---|
| #1 | Avoyan Armen | 14 |
| #2 | Shih Hong | 11 |
| #3 | Outka Duane | 5 |
| #4 | Daugherty John | 4 |
| #5 | La Croix Cliff | 3 |
| #6 | Fang Yan | 2 |
| #7 | Zhou Catherine | 2 |
| #8 | Whitten Stephen | 2 |
| #9 | Jafarian-Tehrani Seyed Jafar | 1 |
| #10 | Lacroix Cliff | 1 |
| Publication | Filing date | Title |
|---|---|---|
| US2013104938A1 | Methods for mixed acid cleaning of showerhead electrodes | |
| US2013263897A1 | Dielectric window cleaning apparatuses | |
| US2013019907A1 | Dual phase cleaning chambers and assemblies comprising the same | |
| WO2011084127A2 | Methodology for cleaning of surface metal contamination from an upper electrode used in a plasma chamber | |
| US2009325320A1 | Processes for reconditioning multi-component electrodes | |
| US2009311079A1 | Electrode transporter and fixture sets incorporating the same | |
| US2005217795A1 | Method of plasma etch endpoint detection using a V-I probe diagnostics |