| # | Country | Total Patents | |
|---|---|---|---|
| #1 | United States | 11 | |
| #2 | WIPO (World Intellectual Property Organization) | 2 |
| # | Industry | |
|---|---|---|
| #1 | Electrical machinery and energy | |
| #2 | Micro-structure and nano-technology |
| # | Technology | |
|---|---|---|
| #1 | Electric discharge tubes | |
| #2 | Nanostructure applications |
| # | Name | Total Patents |
|---|---|---|
| #1 | Preikszas Dirk | 13 |
| #2 | Steigerwald Michael | 2 |
| #3 | Albiez Michael | 1 |
| #4 | Ackermann Joerg | 1 |
| #5 | Hayn Armin Heinz | 1 |
| #6 | Mommsen Momme | 1 |
| #7 | Tobias Daniel | 1 |
| #8 | Doenitz Dietmar | 1 |
| #9 | Hendrich Christian | 1 |
| #10 | Eisele Andreas | 1 |
| Publication | Filing date | Title |
|---|---|---|
| US2010327179A1 | Charged particle beam column and method of operating same | |
| US2010294930A1 | Scanning charged particle beams |