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proofreader
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multipole
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Monochromator and beam source with monochromator
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Phase plate, image forming method and electron microscope
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Electron-optical corrector for aplanatic imaging systems
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Corrective for eliminating the third-order aperture aberration and the first-order, first-degree axial, chromatic aberration
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Electron optics corrector of third order opening errors and anisotropic azimuthal components of the outer axial coma of the third order uses at least three coaxial hexapolar fields and spherical lenses
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Lens structure for applying electrons to transfer areas of an object's surface into an image surface has a laterally sliding optical axis for corpuscular rays.
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Particle optical corrector
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Slit lens arrangement for particle beam e.g. for electron or ion beam lithography, uses 2 combined lenses each having electrostatic cylindrical lens and magnetic quadrupole lens
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Electrostatic corrector for removing color aberrations in particle lenses has a straight optical axis and two correcting pieces behind each other along the optical axis each with electrical quadrupolar and round lens fields.
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Beam generation system for electrons or ion beams of high monochrome or high current density
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Method for determining geometrically optical aberrations
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Electron-optical lens arrangement with a widely displaceable axis
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Electrostatic corrector to remove the color error from particle lenses
