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Heating system of PE-CVD reactor spray plate
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Spray plate device with radio frequency guided from spray plate
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Wafer surface cleaning method
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Heating system for improving temperature uniformity of silicon wafer
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Deposition device and method for multilayer stack film
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Heating device and temperature control spray assembly
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Gas distribution device for multiple chemical sources
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Chemical heating device for semiconductor manufacturing
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Wafer support seat with resonant circuit
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Wafer support seat with tunable radio frequency component
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A set of insulation cover for preventing heating plate edge thermal loss
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A kind of tooling concentric applied to two parts of adjustment
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Wafer heated seats with crosspoint array
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Multistage spray assemblies
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The substrate bearing device inhibited with electrostatic force
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Spray structure and chemical source supply system
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Ceramic ring and semiconductor reaction cavity with ceramic ring
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Wafer processing device
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A kind of transfer of wafer and measuring system
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