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ONWAFER TECHNOLOGIES INC

Overview
  • Total Patents
    26
About

ONWAFER TECHNOLOGIES INC has a total of 26 patent applications. Its first patent ever was published in 2000. It filed its patents most often in United States, Taiwan and WIPO (World Intellectual Property Organization). Its main competitors in its focus markets measurement, semiconductors and control are FUNK MERRITT, TECH SEMICONDUCTOR SINGAPORE and GE FANUC INTELLIGENT PLATFORMS.

Patent filings in countries

World map showing ONWAFER TECHNOLOGIES INCs patent filings in countries

Patent filings per year

Chart showing ONWAFER TECHNOLOGIES INCs patent filings per year from 1900 to 2020

Top inventors

# Name Total Patents
#1 Spanos Costas J 18
#2 Freed Mason L 17
#3 Mundt Randall S 11
#4 Poolla Kameshwar 8
#5 Welch Michael 6
#6 Hunt Dean 4
#7 Macdonald Paul D 4
#8 Kruger Michiel 2
#9 Carter Daniel C 2
#10 Mahoney Leonard J 2

Latest patents

Publication Filing date Title
WO2006028779A2 Electrically floating diagnostic plasma probe with ion property sensors
WO2006010108A2 Methods and apparatus for low distortion parameter measurements
TW200627104A Methods of and apparatuses for maintenance, diagnosis, and optimization of processes
TW200532465A Systems, maintenance units and substrate processing systems for wirelessly charging and wirelessly communicating with sensor apparatus as well as methods for wirelessly charging and communicating with sensor apparatus
US7282889B2 Maintenance unit for a sensor apparatus
US7016754B2 Methods of and apparatus for controlling process profiles
US7212950B2 Methods and apparatus for equipment matching and characterization
US6907364B2 Methods and apparatus for deriving thermal flux data for processing a workpiece
US6671660B2 Methods and apparatus for power control
US6789034B2 Data collection methods and apparatus with parasitic correction
TW594455B Methods and apparatus for obtaining data for process operation, optimization, monitoring, and control
US6542835B2 Data collection methods and apparatus
US6691068B1 Methods and apparatus for obtaining data for process operation, optimization, monitoring, and control