| # | Country | Total Patents | |
|---|---|---|---|
| #1 | WIPO (World Intellectual Property Organization) | 6 | |
| #2 | United States | 5 |
| # | Industry | |
|---|---|---|
| #1 | Semiconductors | |
| #2 | Control | |
| #3 | Environmental technology | |
| #4 | Electrical machinery and energy | |
| #5 | Chemical engineering | |
| #6 | Engines, pumps and turbines | |
| #7 | Machines | |
| #8 | Optics | |
| #9 | Surface technology and coating |
| # | Name | Total Patents |
|---|---|---|
| #1 | Funk Merritt | 11 |
| #2 | Sundararajan Radha | 5 |
| #3 | Chen Lee | 3 |
| #4 | Zhao Jianping | 2 |
| #5 | Natzle Wesley | 2 |
| #6 | Lane Barton | 2 |
| #7 | Yamashita Asao | 1 |
| #8 | Lally Kevin | 1 |
| #9 | Tozawa Masaki | 1 |
| #10 | Prager Daniel | 1 |
| Publication | Filing date | Title |
|---|---|---|
| US2013115110A1 | Processing chamber integrated pressure control | |
| US2010214545A1 | Creating metal gate structures using Lithography-Etch-Lithography-Etch (LELE) processing sequences | |
| US2007238201A1 | Dynamic metrology sampling with wafer uniformity control |