A method of determining a repair shape of a defect at or near an edge of a substrate of a photomask
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Material processing system and method
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Method for high-resolution processing of thin layers with electron beams
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Orbitron pump
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Miniaturized terahertz radiation source
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Method for determining the refractive index
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Method for producing structures in a substrate in the nanometer range
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Device for entering information by means of an object approaching the device
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Method of making a miniature electrostatic lens
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Method and device for producing the pixel radiation sources for flat color screens
