| # | Country | Total Patents | |
|---|---|---|---|
| #1 | United States | 14 |
| # | Industry | |
|---|---|---|
| #1 | Electrical machinery and energy | |
| #2 | Semiconductors | |
| #3 | Surface technology and coating | |
| #4 | Packaging and shipping |
| # | Technology | |
|---|---|---|
| #1 | Electric discharge tubes | |
| #2 | Semiconductor devices | |
| #3 | Coating metallic material | |
| #4 | Transport or storage devices |
| # | Name | Total Patents |
|---|---|---|
| #1 | Himori Shinji | 14 |
| #2 | Matsuyama Shoichiro | 4 |
| #3 | Kosakai Mamoru | 3 |
| #4 | Inazumachi Hiroshi | 3 |
| #5 | Matsuura Atsushi | 3 |
| #6 | Matsudo Tatsuo | 3 |
| #7 | Miura Yukio | 2 |
| #8 | Ito Etsuji | 2 |
| #9 | Hayashi Daisuke | 2 |
| #10 | Maki Keigo | 2 |
| Publication | Filing date | Title |
|---|---|---|
| US2008062610A1 | Electrostatic chuck device | |
| US2008062611A1 | Electrostatic chuck device | |
| US2008062609A1 | Electrostatic chuck device | |
| US2006081337A1 | Capacitive coupling plasma processing apparatus |