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LUBOMIRSKY DMITRY

Overview
  • Total Patents
    13
  • GoodIP Patent Rank
    233,573
  • Filing trend
    ⇩ 100.0%
About

LUBOMIRSKY DMITRY has a total of 13 patent applications. It decreased the IP activity by 100.0%. Its first patent ever was published in 2007. It filed its patents most often in United States. Its main competitors in its focus markets semiconductors, electrical machinery and energy and surface technology and coating are SPTS TECHNOLOGIES LTD, HAUTALA JOHN J and INOCT CO LTD.

Patent filings in countries

World map showing LUBOMIRSKY DMITRYs patent filings in countries
# Country Total Patents
#1 United States 13

Patent filings per year

Chart showing LUBOMIRSKY DMITRYs patent filings per year from 1900 to 2020

Top inventors

# Name Total Patents
#1 Lubomirsky Dmitry 13
#2 Floyd Kirby H 3
#3 Venkataraman Shankar 3
#4 Yieh Ellie 2
#5 Khan Adib 2
#6 Pinson Jay 2
#7 Pinson Ii Jay D 2
#8 Yang Jang-Gyoo 2
#9 Chuc Kien 2
#10 Ramaswamy Kartik 1

Latest patents

Publication Filing date Title
US2013279066A1 Electrostatic chuck with advanced RF and temperature uniformity
US2013276980A1 Esc with cooling base
US2012193456A1 Gas distribution plate with discrete protective elements
US2012079982A1 Module for ozone cure and post-cure moisture treatment
US2012145079A1 Loadlock batch ozone cure
US2012103970A1 Heater with independent center zone control
US2011114601A1 Plasma source design
US2011115378A1 Plasma source design
US2009283217A1 Apparatus for etching semiconductor wafers
US2009034148A1 Method of making an electrostatic chuck with reduced plasma penetration and arcing
US2007298585A1 Dielectric deposition and etch back processes for bottom up gapfill