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CN112283436A
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Door valve assembly, semiconductor device and control method of door valve assembly
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Semiconductor process equipment and electric energy recovery device thereof
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CN112259479A
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Process chamber and semiconductor process equipment
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CN112271155A
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Bearing device and semiconductor process equipment
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CN112254536A
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Support heat preservation device and vertical furnace
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CN112259491A
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Semiconductor process equipment and impedance adjusting method thereof
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CN112259433A
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Impedance matching method, impedance matcher and semiconductor process equipment
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CN112259472A
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Semiconductor cleaning equipment and cleaning medium temperature control method
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CN112259429A
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Semiconductor process equipment
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CN112249709A
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Manipulator and method for acquiring and transmitting wafer by using manipulator
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CN112233999A
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Semiconductor process equipment and turntable mechanism thereof
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CN112201612A
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Semiconductor process chamber and supporting mechanism thereof
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CN112289708A
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Temperature regulation rate control device and method and semiconductor equipment
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CN112151364A
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Semiconductor reaction chamber
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CN112151436A
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Compression ring assembly and semiconductor process chamber
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CN112281143A
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Semiconductor device and chamber pressure control method
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CN112133664A
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Electrostatic chuck device and semiconductor processing equipment
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CN112151421A
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Cover opening mechanism for semiconductor device and semiconductor equipment
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CN112133657A
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Semiconductor processing equipment and method for transmitting wafer
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CN112151431A
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Pre-loading chamber and semiconductor process platform
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