Plasma processing device with a contactless rf voltage feed to a movable plasma electrode unit and method for operating such a plasma processing device
EP3236492A1
Method and system for controlling a device for grasping or positioning substrates arranged on a substrate carrier
DE102016106563A1
Method for producing a solar cell, solar cell produced by the method and substrate carrier
TW201737284A
Device for extracting electrical charge carriers from a charge carrier production area, and method for operating such a device
EP3223318A1
Hetero junction photovoltaic cell and method of manufacturing same
