| # | Country | Total Patents | |
|---|---|---|---|
| #1 | United States | 19 |
| # | Industry | |
|---|---|---|
| #1 | Semiconductors | |
| #2 | Surface technology and coating | |
| #3 | Electrical machinery and energy | |
| #4 | Environmental technology | |
| #5 | Chemical engineering | |
| #6 | Machines | |
| #7 | Thermal processes |
| # | Name | Total Patents |
|---|---|---|
| #1 | Kishimoto Katsushi | 19 |
| #2 | Fukuoka Yusuke | 13 |
| #3 | Ozaki Yusuke | 4 |
| #4 | Tadokoro Hiroyuki | 3 |
| #5 | Isshiki Kazuhiko | 1 |
| #6 | Mizuta Masanori | 1 |
| #7 | Tanigawa Nobuyuki | 1 |
| #8 | Nishi Yutaka | 1 |
| #9 | Toyoda Mitsuhiro | 1 |
| #10 | Kohama Noriyoshi | 1 |
| Publication | Filing date | Title |
|---|---|---|
| US2011108128A1 | Vacuum treatment apparatus and gas supply method | |
| US2009113912A1 | Cooling System, Method for Operating the Same, and Plasma Processing System Using Cooling System |