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CN111960313A
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Substrate lifting mechanism
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WO2021062881A1
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Coating and development equipment
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CN109807027A
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A kind of glue mouth cleaning system and its cleaning method using automatically controlled suck back valve
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CN109807003A
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A kind of glue spreader
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CN109817543A
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A method of whether detection wafer is laid flat
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CN109817542A
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A kind of wafer wet processing equipment air-supply structure
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CN109817544A
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Semiconductor equipment heats cooling combined disk device
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CN109807766A
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A kind of disk cover quick-release arrangement for wafer-baking unit
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CN109817560A
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A kind of wafer adsorption device preventing heat transfer
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CN109795817A
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A kind of liquid capsule pressurized tank
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CN109800023A
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A kind of automatic double surface gluer parameter configuring system and its design method
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CN109765759A
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A kind of sol evenning machine air exhausting device
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CN109427550A
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A kind of thickening unit HMDS purging structure
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CN109254504A
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A kind of glue-spreading development equipment system of more litho machines of expansible connection
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CN109216225A
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A kind of movable air-filled sealing device and its application method
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CN108962804A
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A kind of uninterrupted formula returns sheet devices and control method into piece
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CN108107687A
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A kind of waste liquid classified collection device and its categorised collection method
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CN108372040A
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A kind of nozzle moisturizing switching mechanism
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CN108109951A
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It is a kind of can centering wafer transfer device
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CN108107680A
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Stack puddle development system
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