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FR2843629A1
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Fast thermal processing device having inside the reaction chamber of cold-walled halogen infrared lamps
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AU2002233412A1
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Anti-corrosive metal reaction chamber for chemical vapour deposition or rapid thermal annealing process
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FR2829037A1
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Multi-speaker device for fractional evaporation and separation of a solution
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FR2818292A1
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Anti-corrosion metal reaction chamber cvd or rtp
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FR2816520A1
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Multi-zone injection device in an rtp or cvd reactor with electromagnetic radiation lamp heating
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FR2816519A1
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Gas injection device in an electromagnetic radiation lamp heating reactor, and treatment oven provided with such a device
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FR2815395A1
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Device for quick and uniform heating of a substrate by infrared radiation
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FR2800754A1
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Device for evaporating a chemical vapor deposit system
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FR2792774A1
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Method and device for treating a material by electromagnetic radiation and in a controlled atmosphere
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FR2792084A1
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Integrated heating and cooling device in a heat treatment reactor of a substrate
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