WO2008079221A1
|
|
Polysilicon dummy wafers and process used therewith
|
US2007181066A1
|
|
Baffled liner cover
|
US2007169701A1
|
|
Tubular or Other Member Formed of Staves Bonded at Keyway Interlocks
|
US2006249080A1
|
|
Silicon shelf towers
|
WO2006091413A2
|
|
Silicon gas injector and method of making
|
US2007006803A1
|
|
Detachable edge ring for thermal processing support towers
|
US7083694B2
|
|
Adhesive of a silicon and silica composite particularly useful for joining silicon parts
|
US7074693B2
|
|
Plasma spraying for joining silicon parts
|
WO02095807A2
|
|
Silicon fixtures useful for high temperature wafer processing
|
WO0203428A2
|
|
Silicon fixtures for supporting wafers during thermal processing and method of fabrication
|
US7108746B2
|
|
Silicon fixture with roughened surface supporting wafers in chemical vapor deposition
|
US6727191B2
|
|
High temperature hydrogen anneal of silicon wafers supported on a silicon fixture
|
US6284997B1
|
|
Crack free welding of silicon
|
US6450346B1
|
|
Silicon fixtures for supporting wafers during thermal processing
|
US6455395B1
|
|
Method of fabricating silicon structures including fixtures for supporting wafers
|
EP1171905A1
|
|
Silicon fixtures for wafer processing and method of fabrication
|
US6225594B1
|
|
Method and apparatus for securing components of wafer processing fixtures
|
US6196211B1
|
|
Support members for wafer processing fixtures
|
US6205993B1
|
|
Method and apparatus for fabricating elongate crystalline members
|