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AU2004216038A1
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Micromachined assembly with a multi-layer cap defining cavity
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US7492019B2
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Micromachined assembly with a multi-layer cap defining a cavity
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Encapsulation of MEMS devices using pillar-supported caps
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Use of momentum transfer actuators for motion control of flexible mechanical structures
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Thin film MEMS sensors employing electrical sensing and force feedback
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Accelerometer-assisted servo writing for disk drives
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Manufacture of MEMS structures in sealed cavity using dry-release MEMS device encapsulation
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