| # | Country | Total Patents | |
|---|---|---|---|
| #1 | United States | 14 |
| # | Industry | |
|---|---|---|
| #1 | Micro-structure and nano-technology | |
| #2 | Semiconductors | |
| #3 | Surface technology and coating |
| # | Technology | |
|---|---|---|
| #1 | Semiconductor devices | |
| #2 | Making microstructural devices | |
| #3 | Microstructural devices | |
| #4 | Coating metallic material |
| # | Name | Total Patents |
|---|---|---|
| #1 | Partridge Aaron | 14 |
| #2 | Lutz Markus | 14 |
| #3 | Gupta Pavan | 10 |
| #4 | Kronmueller Silvia | 4 |
| Publication | Filing date | Title |
|---|---|---|
| US2007170528A1 | Wafer encapsulated microelectromechanical structure and method of manufacturing same |