| # | Country | Total Patents | |
|---|---|---|---|
| #1 | United States | 11 |
| # | Industry | |
|---|---|---|
| #1 | Micro-structure and nano-technology | |
| #2 | Measurement | |
| #3 | Semiconductors | |
| #4 | Chemical engineering | |
| #5 | Audio-visual technology | |
| #6 | Machines |
| # | Name | Total Patents |
|---|---|---|
| #1 | Feyh Ando | 11 |
| #2 | Chen Po-Jui | 2 |
| #3 | Lammer Marco | 1 |
| #4 | Franke Axel | 1 |
| #5 | Leinenbach Christina | 1 |
| #6 | O'Brien Gary | 1 |
| Publication | Filing date | Title |
|---|---|---|
| US2014150552A1 | Chip level sensor with multiple degrees of freedom | |
| US2013015536A1 | MEMS with single use valve and method of operation |