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Extended sensor back volume
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Water resistant ultra-low pressure sensor and method of fabrication of same
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Silicon piezoelectric speaker
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TW200714116A
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Silicon microphone
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TW200624371A
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Silicon microphone
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SG127754A1
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Silicon microphone
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US7080559B1
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Transducer
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SG121923A1
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Silicon microphone
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TW200519386A
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A three-axis accelerometer
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WO2004105428A1
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Fabrication of silicon microphones
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TW200501788A
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Fabrication of silicon microphones
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US2005262934A1
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Tyre pressure monitoring sensor
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Dry reactive ion etching
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A three-axis accelerometer
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Fabrication of an embossed diaphragm
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Wet time etching
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SG101537A1
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Method of forming atomic force microscope tips
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Method of manufacturing an accelerometer
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