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EPSILON TECHN INC

Overview
  • Total Patents
    27
About

EPSILON TECHN INC has a total of 27 patent applications. Its first patent ever was published in 1986. It filed its patents most often in United States, WIPO (World Intellectual Property Organization) and Germany. Its main competitors in its focus markets surface technology and coating, semiconductors and packaging and shipping are CBL TECHNOLOGIES INC, CITIZEN TOHOKU KK and FURUKAWA COMPANY LTD.

Patent filings in countries

World map showing EPSILON TECHN INCs patent filings in countries

Patent filings per year

Chart showing EPSILON TECHN INCs patent filings per year from 1900 to 2020

Top inventors

# Name Total Patents
#1 Ozias Albert E 15
#2 Robinson Mcdonald 11
#3 Deboer Wiebe B 7
#4 Ferro Armand P 7
#5 Goodwin Dennis L 7
#6 Crabb Richard 7
#7 Hawkins Mark R 6
#8 Klem David C 4
#9 De Boer Wiebe 1
#10 Ovias Albert E 1

Latest patents

Publication Filing date Title
US5261960A Reaction chambers for CVD systems
US5156521A Method for loading a substrate into a GVD apparatus
US5198034A Rotatable substrate supporting mechanism with temperature sensing device for use in chemical vapor deposition equipment
US5080549A Wafer handling system with Bernoulli pick-up
US5117769A Drive shaft apparatus for a susceptor
US5044315A Apparatus for improving the reactant gas flow in a reaction chamber
US4993355A Susceptor with temperature sensing device
US4996942A Rotatable substrate supporting susceptor with temperature sensors
US5096534A Method for improving the reactant gas flow in a reaction chamber
US4975561A Heating system for substrates
US5020475A Substrate handling and transporting apparatus
US5092728A Substrate loading apparatus for a CVD process
WO8912907A1 Wafer handling system with bernoulli pick-up
US4828224A Chemical vapor deposition system
US5221556A Gas injectors for reaction chambers in CVD systems
US4846102A Reaction chambers for CVD systems
US4836138A Heating system for reaction chamber of chemical vapor deposition equipment
US4813732A Apparatus and method for automated wafer handling
NL8600534A Device and method for automated waffle processing.