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Reaction chambers for CVD systems
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Method for loading a substrate into a GVD apparatus
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Rotatable substrate supporting mechanism with temperature sensing device for use in chemical vapor deposition equipment
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Wafer handling system with Bernoulli pick-up
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Drive shaft apparatus for a susceptor
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Apparatus for improving the reactant gas flow in a reaction chamber
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Susceptor with temperature sensing device
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Rotatable substrate supporting susceptor with temperature sensors
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Method for improving the reactant gas flow in a reaction chamber
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Heating system for substrates
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Substrate handling and transporting apparatus
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Substrate loading apparatus for a CVD process
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Wafer handling system with bernoulli pick-up
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Chemical vapor deposition system
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Gas injectors for reaction chambers in CVD systems
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Reaction chambers for CVD systems
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Heating system for reaction chamber of chemical vapor deposition equipment
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Device and method for automated waffle processing.
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