Method for cleaning or drying pot-like hollow bodies involves flushing head with outer shape, which is largely complementary to the inner shape of the interior is introduced into the interior
WO2005001888A2
Device and method for cleaning objects used to produce semiconductors, especially transport and cleaning containers for wafers
DE10347464A1
Apparatus and method for cleaning and drying semiconductor products or handling baskets used in the manufacture of semiconductor products
DE10330907A1
Apparatus and method for processing a mask template for semiconductor fabrication
DE10329868A1
Storage system for wafers
DE10317275A1
System for cleaning of equipment used manufacture of semiconductors, using liquid in treatment chamber for cleaning, followed by drying, treatment chamber contains members for moving gases in chamber
