| # | Country | Total Patents | |
|---|---|---|---|
| #1 | Republic of Korea | 13 | |
| #2 | Japan | 3 | |
| #3 | Germany | 1 | |
| #4 | EPO (European Patent Office) | 1 |
| # | Industry | |
|---|---|---|
| #1 | Semiconductors | |
| #2 | Machines | |
| #3 | Packaging and shipping | |
| #4 | Chemical engineering | |
| #5 | Computer technology |
| # | Technology | |
|---|---|---|
| #1 | Semiconductor devices | |
| #2 | Unspecified technologies | |
| #3 | Cleaning | |
| #4 | Unspecified technologies | |
| #5 | Transport or storage devices | |
| #6 | Packaging | |
| #7 | Image data processing | |
| #8 | Data recognition and presentation | |
| #9 | Manipulators |
| # | Name | Total Patents |
|---|---|---|
| #1 | Rebstock Lutz | 12 |
| #2 | Barker David | 3 |
| #3 | Lutz Rebstock | 2 |
| #4 | Farzad Tabrizi | 1 |
| #5 | Lobianco Robert | 1 |
| #6 | Amin Bhavesh | 1 |
| #7 | David Barker | 1 |
| #8 | Tabrizi Farzad | 1 |
| #9 | Meichsner Michael | 1 |
| Publication | Filing date | Title |
|---|---|---|
| KR20190083005A | Semiconductor cleaner systems and methods | |
| KR20100113625A | Automatic handling buffer for bare stocker | |
| DE102006028057A1 | Device for storing contamination-sensitive, plate-shaped objects, in particular for storing semiconductor wafers |