| # | Country | Total Patents | |
|---|---|---|---|
| #1 | United States | 14 | |
| #2 | WIPO (World Intellectual Property Organization) | 2 |
| # | Industry | |
|---|---|---|
| #1 | Surface technology and coating | |
| #2 | Semiconductors | |
| #3 | Electrical machinery and energy | |
| #4 | Environmental technology | |
| #5 | Machines |
| # | Name | Total Patents |
|---|---|---|
| #1 | Dickey Eric R | 16 |
| #2 | Barrow William A | 7 |
| #3 | Danforth Bryan Larson | 5 |
| #4 | Kon Masato | 1 |
| Publication | Filing date | Title |
|---|---|---|
| US2017088951A1 | Deposition of high-quality mixed oxide barrier films | |
| US2015252478A1 | Electrically- and chemically-active adlayers for plasma electrodes | |
| US2014329030A1 | Plasma generation for thin film deposition on flexible substrates | |
| US2011159204A1 | Oxygen radical generation for radical-enhanced thin film deposition | |
| US2008026162A1 | Radical-enhanced atomic layer deposition system and method |