Thermal gradient enhanced chemical vapour deposition (tge-cvd)
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Storage magazine of a CVD system
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Apparatus and method for simultaneously depositing multiple semiconductor layers in multiple process chambers
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A thermal treatment method comprising a heating step, a treatment step and a cooling step
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MOCVD reactor with a locally different to a Wärmeableitorgan coupled ceiling plate
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Device for producing an aerosol, comprises an injector for introducing small material particles into a carrier gas stream, a thinner, which is line-connected with the injector, and an evaporator, which is line-connected with the thinner
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Device for homogenizing a vaporized aerosol and device for depositing an organic layer on a substrate with such a homogenizing device
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Coating device and method for operating a coating device with a screen plate
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Gas inlet element with baffle plate arrangement
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CVD reactor with multi-zone gas cushion substrate holder
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CVD reactor
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CVD method and CVD reactor
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CVD reactor with strip-like gas inlet zones and method for depositing a layer on a substrate in such a CVD reactor
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Method for setting up an epitaxial reactor
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A method for depositing a thin-film polymer in a low pressure gas phase
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MOCVD reactor with cylindrical gas inlet member
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Method and device for depositing laterally structured layers by means of a shadow mask held magnetically on a substrate holder
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Method and apparatus for depositing thin layers of polymeric para-xylylenes or substituted para-xylylenes
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Novel plasma system for improved process capability
