| # | Country | Total Patents | |
|---|---|---|---|
| #1 | United States | 11 |
| # | Industry | |
|---|---|---|
| #1 | Surface technology and coating | |
| #2 | Semiconductors | |
| #3 | Machines | |
| #4 | Environmental technology | |
| #5 | Mechanical elements |
| # | Name | Total Patents |
|---|---|---|
| #1 | Lindfors Sven | 11 |
| #2 | Soininen Pekka J | 4 |
| #3 | Poutiainen Juha A Kustaa-Adolf | 1 |
| #4 | Soininen Pekka T | 1 |
| #5 | Poutiainen Juha Allan Kustaa-Adolf | 1 |
| Publication | Filing date | Title |
|---|---|---|
| US2015307989A1 | Atomic layer deposition method and apparatuses | |
| US2010028122A1 | Atomic layer deposition apparatus and loading methods | |
| US2009297710A1 | System and method for loading a substrate holder carrying a batch of vertically placed substrates into an atomic layer deposition reactor | |
| US2009263578A1 | Apparatus and methods for deposition reactors | |
| US2006196418A1 | Apparatuses and methods for deposition of material on surfaces |