| # | Country | Total Patents | |
|---|---|---|---|
| #1 | Republic of Korea | 17 |
| # | Industry | |
|---|---|---|
| #1 | Surface technology and coating | |
| #2 | Semiconductors | |
| #3 | Machines | |
| #4 | Thermal processes | |
| #5 | Measurement | |
| #6 | Control |
| # | Name | Total Patents |
|---|---|---|
| #1 | Matsuo Takenobu | 2 |
| #2 | Wakabayashi Tsuyoshi | 2 |
| #3 | Tanahashi Takashi | 2 |
| #4 | Nishi Hironobu | 2 |
| #5 | Yamaga Genichi | 1 |
| #6 | Hukusima Hiroki | 1 |
| #7 | Nishimura Toshiharu | 1 |
| #8 | Imaima Sayuki | 1 |
| #9 | Yamaka Kenichi | 1 |
| #10 | Nisi Gasoh | 1 |
| Publication | Filing date | Title |
|---|---|---|
| KR100260120B1 | Heat treatment apparatus | |
| KR100248563B1 | Method for forming silicon film | |
| KR100253124B1 | Air cleaning apparatus and air cleaning method | |
| KR100268526B1 | Processing apparatus using gas | |
| KR100251873B1 | Vertical type heat treating apparatus | |
| KR0181524B1 | Treatment object evaporting device |