TEL SAGAMI LTD innovation strategy

Patent filings in countries

#	Industry
#1	Semiconductors
#2	Surface technology and coating
#3	Machines
#4	Thermal processes
#5	Electrical machinery and energy
#6	Materials and metallurgy
#7	Packaging and shipping

#	Technology
#1	Semiconductor devices
#2	Unspecified technologies
#3	Single-crystal-growth
#4	Furnaces
#5	Coating metallic material
#6	Details of furnaces
#7	Special electric heating or lighting
#8	Electric discharge tubes
#9	Metal tempering
#10	Manipulators

Publication	Filing date	Title
US5445486A	1994-06-17	Substrate transferring apparatus
US5536918A	1994-05-16	Heat treatment apparatus utilizing flat heating elements for treating semiconductor wafers
US5393349A	1993-09-27	Semiconductor wafer processing apparatus
US5423503A	1993-05-05	Plate-like member conveying apparatus
US5261935A	1993-02-26	Clean air apparatus
US5429498A	1992-12-07	Heat treatment method and apparatus thereof
US5273424A	1992-08-13	Vertical heat treatment apparatus
JPH05190479A	1992-07-10	Vertical heat treating apparatus
US5308955A	1992-07-08	Vertical heat treatment apparatus with vented heat insulation cover means
US5275521A	1992-07-02	Wafer transfer device
JPH05196371A	1992-06-15	Forced air cooling device for heat treatment furnace
US5249960A	1992-06-10	Forced cooling apparatus for heat treatment apparatus
KR0155390B1	1992-05-08	Cleaning apparatus
US5236295A	1992-04-22	Arm apparatus for conveying semiconductor wafer and processing system using same
US5271732A	1992-03-26	Heat-treating apparatus
US5318633A	1992-03-06	Heat treating apparatus
US5277579A	1992-03-06	Wafers transferring method in vertical type heat treatment apparatus and the vertical type heat treatment apparatus provided with a wafers transferring system
JPH05206042A	1992-01-27	Heat treatment method and heat treatment apparatus
JPH05206047A	1992-01-27	Heat treatment apparatus
JPH05206043A	1992-01-27	Heat treatment method