| # | Country | Total Patents | |
|---|---|---|---|
| #1 | Republic of Korea | 13 | |
| #2 | Taiwan | 1 |
| # | Industry | |
|---|---|---|
| #1 | Semiconductors | |
| #2 | Machines | |
| #3 | Optics | |
| #4 | Surface technology and coating | |
| #5 | Chemical engineering |
| # | Name | Total Patents |
|---|---|---|
| #1 | Kimura Yoshio | 2 |
| #2 | Mathusita Michiaki | 1 |
| #3 | Miyajaki Dakanori | 1 |
| #4 | Semba Norio | 1 |
| #5 | Kamikawa Yuuji | 1 |
| #6 | Nomura Masafumi | 1 |
| #7 | Nishi Mitsuno | 1 |
| #8 | Murakami Masaaki | 1 |
| #9 | Shinzi Kitamura | 1 |
| #10 | Morioka Norimitsu | 1 |
| Publication | Filing date | Title |
|---|---|---|
| KR100262902B1 | Method and apparatus for developing treatment | |
| KR0170391B1 | Processing apparatus with a gas distributor having back and forth parallel movement relative to a workpiece support |