| # | Country | Total Patents | |
|---|---|---|---|
| #1 | United States | 6 | |
| #2 | WIPO (World Intellectual Property Organization) | 4 | |
| #3 | Australia | 2 |
| # | Industry | |
|---|---|---|
| #1 | Semiconductors | |
| #2 | Machines |
| # | Technology | |
|---|---|---|
| #1 | Semiconductor devices | |
| #2 | Unspecified technologies |
| # | Name | Total Patents |
|---|---|---|
| #1 | Babbs Daniel A | 7 |
| #2 | Shultz Richard E | 5 |
| #3 | Schultz Richard E | 2 |
| #4 | Strien John Van | 1 |
| #5 | Sussman Jay S L | 1 |
| Publication | Filing date | Title |
|---|---|---|
| US6077026A | Programmable substrate support for a substrate positioning system | |
| US5823361A | Substrate support apparatus for a substrate housing | |
| US5853214A | Aligner for a substrate carrier | |
| US5664926A | Stage assembly for a substrate processing system | |
| US5785186A | Substrate housing and docking system |