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WO9712226A1
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Improved system for surface inspection
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US5581350A
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Method and system for calibrating an ellipsometer
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US5604585A
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Particle detection system employing a subsystem for collecting scattered light from the particles
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US5608526A
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Focused beam spectroscopic ellipsometry method and system
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US5705741A
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Constant-force profilometer with stylus-stabilizing sensor assembly, dual-view optics, and temperature drift compensation
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US5530550A
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Optical wafer positioning system
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US5633747A
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Variable spot-size scanning apparatus
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US5565979A
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Surface scanning apparatus and method using crossed-cylinder optical elements
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US5576831A
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Wafer alignment sensor
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US5416594A
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Surface scanner with thin film gauge
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US5355212A
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Process for inspecting patterned wafers
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US5552704A
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Eddy current test method and apparatus for measuring conductance by determining intersection of lift-off and selected curves
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CH685519A5
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Method and apparatus for non-destructive surface inspection.
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US5309755A
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Profilometer stylus assembly insensitive to vibration
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US5243465A
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Area-division beamsplitter with broad spectral bandwidth
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US5276498A
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Adaptive spatial filter for surface inspection
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US5241366A
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Thin film thickness monitor
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US5264912A
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Speckle reduction track filter apparatus for optical inspection of patterned substrates
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US5189481A
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Particle detector for rough surfaces
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CH685650A5
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Device for surface inspections.
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