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SENSYS INSTR CORP

Overview
  • Total Patents
    27
About

SENSYS INSTR CORP has a total of 27 patent applications. Its first patent ever was published in 1997. It filed its patents most often in United States, WIPO (World Intellectual Property Organization) and Australia. Its main competitors in its focus markets measurement, machine tools and semiconductors are THERMA WAVE INC, SHANGHAI STAL PREC STAINLESS STEEL CO LTD and J & M ANALYTISCHE MESS & REGELTECHNIK GMBH.

Patent filings per year

Chart showing SENSYS INSTR CORPs patent filings per year from 1900 to 2020

Focus industries

Top inventors

# Name Total Patents
#1 Stanke Fred E 26
#2 Pham Hung 9
#3 Weber-Grabau Michael 9
#4 Tong Edric H 9
#5 Norton Adam E 9
#6 Johnson Kenneth C 8
#7 Ruth Douglas E 6
#8 Cahill James M Jr 5
#9 Hyatt Badru D 3
#10 Anguelov Ivelin A 3

Latest patents

Publication Filing date Title
WO02065545A2 Overlay alignment metrology using diffraction gratings
US6677602B1 Notch and flat sensor for wafer alignment
WO0215238A2 Device and method for optical inspection of semiconductor wafer
AU7924701A Database interpolation method for optical measurement of diffractive microstructures
WO0215261A2 Bathless wafer measurement apparatus and method
US6510395B2 Method of detecting residue on a polished wafer
AU4175800A Method and apparatus for wafer metrology
US6690473B1 Integrated surface metrology
US6019000A In-situ measurement of deposition on reactor chamber members
US5996415A Apparatus and method for characterizing semiconductor wafers during processing