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RF MEMS digital variable capacitance unit
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RF MEMS digital variable capacitor array structure
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A kind of mixing phase shifter based on mems switch
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A kind of high switching capacity ratio RF MEMS capacitive switch
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Bistable state RF MEMS touch switch based on lever principle
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A kind of high-power mems switch applied to RF application
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A kind of RF MEMS Switches of high-performance high power capacity
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Prepare the mobile micro-structure switch process of alloy material and its mobile micro-structure switch
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Prepare the method and micro electro-mechanical system switch of high-performance radio-frequency micro electro-mechanical system switch
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Wet etching packaging structure and its dicing method applied to RF MEMS
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Suitable for the bonding packaging construction and its method of RF MEMS
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RF mems switches encapsulating structure and its method for packing based on photosensitive BCB bondings
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For the wafer-level package structure and its method for packing of radio-frequency micro electromechanical system
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Laterally interconnection low-temperature round slice level packaging methods for the application of RF MEMS device
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A kind of MEMS rotary actuator based on electrothermal drive
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