| # | Country | Total Patents | |
|---|---|---|---|
| #1 | United States | 17 |
| # | Industry | |
|---|---|---|
| #1 | Optics | |
| #2 | Semiconductors | |
| #3 | Micro-structure and nano-technology | |
| #4 | Machines |
| # | Technology | |
|---|---|---|
| #1 | Photomechanical semiconductor production | |
| #2 | Cameras | |
| #3 | Semiconductor devices | |
| #4 | Optical systems | |
| #5 | Shaping of plastics | |
| #6 | Nanostructure applications |
| # | Name | Total Patents |
|---|---|---|
| #1 | Fukuhara Kazuya | 17 |
| #2 | Itoh Masamitsu | 2 |
| #3 | Hashimoto Takaki | 2 |
| #4 | Masukawa Kazuyuki | 2 |
| #5 | Kai Yasunobu | 2 |
| #6 | Higashiki Tatsuhiko | 2 |
| #7 | Hatano Masayuki | 2 |
| #8 | Sato Takashi | 2 |
| #9 | Tanaka Satoshi | 2 |
| #10 | Satake Masaki | 1 |
| Publication | Filing date | Title |
|---|---|---|
| US2008206898A1 | Pattern monitor mark and monitoring method suitable for micropattern |