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Multiple pattern hot spot optimization method
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Method for detecting defects of metal layer in layout
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Photoresist coating method and coating device
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Method for removing amorphous silicon layer in groove
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Method for manufacturing high dielectric constant metal gate
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Method for manufacturing through hole
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System for adjusting pre-alignment height before wafer exposure and using method thereof
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Photoetching machine efficiency evaluation system based on key index algorithm and application method thereof
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Method for improving Fin size of Fin type transistor
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Dual damascene process
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Method for optimizing photoetching focus
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Method for improving line width measurement accuracy of photoresist pattern
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Method for removing contamination particles on surface of photomask protective film
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Control method of plasma dry etching process
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Semiconductor device critical dimension measuring method and method for obtaining SEM image
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Method for manufacturing metal grid
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Plasma source assembly for integrated circuit processing equipment
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Method for forming fin body of semiconductor device
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Ion implantation method after grid formation
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Wet cleaning method for wafer
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