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PLASMA THERM LLC

Overview
  • Total Patents
    103
  • GoodIP Patent Rank
    23,093
  • Filing trend
    ⇩ 85.0%
About

PLASMA THERM LLC has a total of 103 patent applications. It decreased the IP activity by 85.0%. Its first patent ever was published in 2005. It filed its patents most often in United States, EPO (European Patent Office) and China. Its main competitors in its focus markets semiconductors, electrical machinery and energy and machines are PLASMA-THERM LLC, SPARK THERMIONICS INC and PSK INC.

Patent filings per year

Chart showing PLASMA THERM LLCs patent filings per year from 1900 to 2020

Top inventors

# Name Total Patents
#1 Westerman Russell 86
#2 Martinez Linnell 65
#3 Pays-Volard David 57
#4 Johnson David 50
#5 Johnson Chris 48
#6 Grivna Gordon M 28
#7 Gauldin Rich 18
#8 Geerpuram Dwarakanath 14
#9 Gordon Grivna 14
#10 Lea Leslie Michael 13

Latest patents

Publication Filing date Title
TW201947630A Scanning ion beam etch
TW202004883A Method for dicing die attach film
TW201832278A Method and apparatus for plasma dicing a semi-conductor wafer
TW201826387A Ion filter
US2018143332A1 Ion Filter
CN106068548A For the method and apparatus that semiconductor crystal wafer is carried out plasma section
US2014242780A1 Method and apparatus for plasma dicing a semi-conductor wafer
EP2965349A2 Method and apparatus for plasma dicing a semi-conductor wafer
US2014094018A1 Method for dicing a substrate with back metal
US2013344683A1 Method and apparatus for plasma dicing a semi-conductor wafer
US2013230971A1 Method and apparatus for plasma dicing a semi-conductor wafer
US2014235034A1 Method and apparatus for plasma dicing a semi-conductor wafer
US2013230973A1 Method and apparatus for plasma dicing a semi-conductor wafer
CN105047558A Method for plasma dicing a substrate
CN102282645B Conductive seal ring electrostatic chuck