| # | Country | Total Patents | |
|---|---|---|---|
| #1 | Sweden | 4 | |
| #2 | WIPO (World Intellectual Property Organization) | 3 | |
| #3 | EPO (European Patent Office) | 2 | |
| #4 | United States | 2 |
| # | Industry | |
|---|---|---|
| #1 | Micro-structure and nano-technology | |
| #2 | Machines | |
| #3 | Semiconductors | |
| #4 | Optics |
| # | Technology | |
|---|---|---|
| #1 | Making microstructural devices | |
| #2 | Additive manufacturing | |
| #3 | Nanostructure applications | |
| #4 | Microstructural devices | |
| #5 | Semiconductor devices | |
| #6 | Optical systems |
| # | Name | Total Patents |
|---|---|---|
| #1 | Niklaus Frank | 11 |
| #2 | Stemme Goeran | 7 |
| #3 | Oberhammer Joachim | 4 |
| #4 | Fischer Andreas | 3 |
| #5 | Stemme Göran | 1 |
| Publication | Filing date | Title |
|---|---|---|
| WO2011126438A1 | Free form printing of silicon micro- and nanostructures | |
| EP1986950A1 | Mems components and method for manufacturing same | |
| WO2004025727A1 | Method for sealing a microcavity and package comprising at least one microcavity | |
| US7054052B2 | Adhesive sacrificial bonding of spatial light modulators |